X-ray diffraction analysis of quantum cascade lasers

Liwei Cheng, Ruth Choa, Jacob Khurgin, Fow Sen Choa, Xing Chen, Xiaojun Wang, Jenyu Fan, Jianxin Chen, Claire Gmachl

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Growth quality of quantum-cascade-lasers (QCLs) is difficult to be characterized due to the demanding requirements on hetero-interface quality and thickness control for all >1000 nano-scale superlattice stucture. In this work we employ X-ray diffractometry (XRD) to effectively evaluate QCL-wafer growths.

Original languageEnglish (US)
Title of host publicationIEEE International Conference on Indium Phosphide and Related Materials, IPRM 2009
Pages267-269
Number of pages3
DOIs
StatePublished - Oct 2 2009
Externally publishedYes
EventIEEE International Conference on Indium Phosphide and Related Materials, IPRM 2009 - Newport Beach, CA, United States
Duration: May 10 2009May 14 2009

Publication series

NameConference Proceedings - International Conference on Indium Phosphide and Related Materials
ISSN (Print)1092-8669

Other

OtherIEEE International Conference on Indium Phosphide and Related Materials, IPRM 2009
CountryUnited States
CityNewport Beach, CA
Period5/10/095/14/09

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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  • Cite this

    Cheng, L., Choa, R., Khurgin, J., Choa, F. S., Chen, X., Wang, X., Fan, J., Chen, J., & Gmachl, C. (2009). X-ray diffraction analysis of quantum cascade lasers. In IEEE International Conference on Indium Phosphide and Related Materials, IPRM 2009 (pp. 267-269). [5012507] (Conference Proceedings - International Conference on Indium Phosphide and Related Materials). https://doi.org/10.1109/ICIPRM.2009.5012507