Wetting micro- and nanofluidic devices using supercritical water

Robert Riehn, Robert H. Austin

Research output: Contribution to journalArticle

15 Scopus citations

Abstract

We describe a method for wetting micro- and nanofluidic devices with water or any other pure liquid. The process is performed by enclosing the fluidic device in a liquid-filled cell, heating the cell to a temperature above the critical point of the liquid, and subsequent cooling of the cell to room temperature. Because the process liquid is essentially a gas during wetting, arbitrary shapes can be wetted. We demonstrate wetting of micro- and nanostructures in a fused-silica device with only a single inlet. The process is low-cost, fast, safe, and very reliable.

Original languageEnglish (US)
Pages (from-to)5933-5934
Number of pages2
JournalAnalytical Chemistry
Volume78
Issue number16
DOIs
StatePublished - Aug 15 2006

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry

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