Abstract
An innovative detector based on subwavelength metal semiconductor metal (MSM) photodetectors that contains no moving parts and can directly and instantaneously measure both the wavelength and polarization angle of light is presented. The MSM wavelength-polarization detectors are fabricated on a semi-insulating GaAs substrate using electron beam nanolithography and lift-off. The device is operated in wavelength detection mode by using light polarized perpendicular to the detector fingers. The photocurrent ratio has a one-to-one correspondence with the incident light wavelength over the visible spectrum. Taking into account the measurement noise, the device is determined to have a resolution of 5 nm.
Original language | English (US) |
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Pages | 168-169 |
Number of pages | 2 |
State | Published - 1997 |
Externally published | Yes |
Event | Proceedings of the 1997 55th Annual Device Research Conference - Fort Collins, CO, USA Duration: Jun 23 1997 → Jun 25 1997 |
Other
Other | Proceedings of the 1997 55th Annual Device Research Conference |
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City | Fort Collins, CO, USA |
Period | 6/23/97 → 6/25/97 |
All Science Journal Classification (ASJC) codes
- General Engineering