Wavelength and polarization detector using monolithically integrated subwavelength MSM photodetectors

Steven J. Schablitsky, Erli Chen, Stephen Y. Chou

Research output: Contribution to conferencePaper

Abstract

An innovative detector based on subwavelength metal semiconductor metal (MSM) photodetectors that contains no moving parts and can directly and instantaneously measure both the wavelength and polarization angle of light is presented. The MSM wavelength-polarization detectors are fabricated on a semi-insulating GaAs substrate using electron beam nanolithography and lift-off. The device is operated in wavelength detection mode by using light polarized perpendicular to the detector fingers. The photocurrent ratio has a one-to-one correspondence with the incident light wavelength over the visible spectrum. Taking into account the measurement noise, the device is determined to have a resolution of 5 nm.

Original languageEnglish (US)
Pages168-169
Number of pages2
StatePublished - Jan 1 1997
Externally publishedYes
EventProceedings of the 1997 55th Annual Device Research Conference - Fort Collins, CO, USA
Duration: Jun 23 1997Jun 25 1997

Other

OtherProceedings of the 1997 55th Annual Device Research Conference
CityFort Collins, CO, USA
Period6/23/976/25/97

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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    Schablitsky, S. J., Chen, E., & Chou, S. Y. (1997). Wavelength and polarization detector using monolithically integrated subwavelength MSM photodetectors. 168-169. Paper presented at Proceedings of the 1997 55th Annual Device Research Conference, Fort Collins, CO, USA, .