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Water-castable bottom antireflective coatings
Ping Hung Lu
, Salem Mehtsun
, John P. Sagan
, Ralph R. Dammel
,
Iain A. McCulloch
, Ming Kang
, Hatsuyuki Tanaka
, Ken Kimura
Research output
:
Contribution to journal
›
Conference article
›
peer-review
2
Scopus citations
Overview
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Engineering
Standing Wave
100%
Polymer System
100%
Fine Resolution
100%
Design Requirement
100%
Etch Rate
100%
Spin Cast
100%
Keyphrases
Castable
100%
Bottom Anti-reflective Coating
100%
Resist Process
33%
Anti-reflective
33%
High Etch Rate
33%
Swing Angle
33%
Lithographic Performance
33%
Material Science
Physical Property
100%
Optical Property
100%
Ultraviolet Spectroscopy
100%