Voxels: Volume-enclosing microstructures

This paper presents results on the development and fabrication of hollow 3D, programmable-volume, micro-scale, artificial, non-biological volume cells or voxels. The standardized silicon wafer processing method PolyMUMPs was used to construct a variety of polysilicon devices capable of being folded from two-dimensional shapes into three-dimensional regular solids with dimensions in the order of 40-80 νm per side. Folding of the devices was performed by a combination of magnetic and surface tension forces in water. Complete closure of pyramidal structures with dimensions down to 40 νm per side was achieved, as well as folding of five-sided boxes and half-dodecahedrons (lotuses) with dimensions down to 40 νm per side.