Voxels: Volume-enclosing microstructures

Rob Gagler, Alejandro Bugacov, Bruce E. Koel, Peter M. Will

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

This paper presents results on the development and fabrication of hollow 3D, programmable-volume, micro-scale, artificial, non-biological volume cells or voxels. The standardized silicon wafer processing method PolyMUMPs was used to construct a variety of polysilicon devices capable of being folded from two-dimensional shapes into three-dimensional regular solids with dimensions in the order of 40-80 νm per side. Folding of the devices was performed by a combination of magnetic and surface tension forces in water. Complete closure of pyramidal structures with dimensions down to 40 νm per side was achieved, as well as folding of five-sided boxes and half-dodecahedrons (lotuses) with dimensions down to 40 νm per side.

Original languageEnglish (US)
Article number055025
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number5
DOIs
StatePublished - May 1 2008
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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