Vector scattering analysis of TPF coronagraph pupil masks

Keyphrases

• Pupil Mask 100%
• Photomask 66%
• Cross-sectional Geometry 66%
• TM Polarization 33%
• Thick Mask 33%
• Imbalance Effects 33%
• System Simulation 33%
• Perfectly Matched Layer 33%
• Simulation Capability 33%
• Time-domain Electromagnetic 33%
• Chronogram 33%
• Reference Plane 33%
• Opening Size 33%
• Electromagnetic Simulation 33%
• Integrated Circuit Industry 33%
• Cr Mask 33%

Physics

• Systems Simulation 33%
• Perfectly Matched Layer 33%

Engineering

• Opening Width 33%
• Plane of Reference 33%