TY - GEN
T1 - Ultrafast Metal-Semiconductor-Metal Photodetectors with Nanometer Scale Finger Spacing and Width
AU - Liu, Mark Y.
AU - Chou, Stephen Y.
AU - Alexandrou, Sotiris
AU - Hsiang, Thomas Y.
N1 - Funding Information:
The work at the University of Minnesota was supported in part by NSF grant ECS-9120527, ARO grant DAAL03-90-058, and Packard Foundation through a Packard Fellowship. The work at the University of Rochester was supported in part by NSF grant ECS-9203490, the DOE Office of Inertial Confinement Fusion under Cooperative Agreement No. DE-FC03-92SF19460, the University of Rochester, and the New York State Energy Research and Development Authority.
Publisher Copyright:
© 1993 Optical Society of America.
PY - 1993
Y1 - 1993
N2 - We report the fabrication and measurement of ultrafast nanoscale metal-semiconductor-metal photodetectors. The finger spacing and width as small as 25 nm are fabricated using electron beam lithography. Electrooptic sampling was performed at various wavelengths to measure the detectors' response time. The fastest detectors have response times and 3-dB bandwidths of 0.87 ps and 510 GHz on low-temperature GaAs, 1.5 ps and 300 GHz on bulk GaAs, and 3.7 ps and 110 GHz on bulk Si. To our knowledge, they are the fastest photodetectors of their kind. Scaling rules are also proposed.
AB - We report the fabrication and measurement of ultrafast nanoscale metal-semiconductor-metal photodetectors. The finger spacing and width as small as 25 nm are fabricated using electron beam lithography. Electrooptic sampling was performed at various wavelengths to measure the detectors' response time. The fastest detectors have response times and 3-dB bandwidths of 0.87 ps and 510 GHz on low-temperature GaAs, 1.5 ps and 300 GHz on bulk GaAs, and 3.7 ps and 110 GHz on bulk Si. To our knowledge, they are the fastest photodetectors of their kind. Scaling rules are also proposed.
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M3 - Conference contribution
AN - SCOPUS:85136136493
T3 - Optics InfoBase Conference Papers
SP - 53
EP - 55
BT - Ultrafast Electronics and Optoelectronics, UEO 1993
PB - Optica Publishing Group (formerly OSA)
T2 - Ultrafast Electronics and Optoelectronics, UEO 1993
Y2 - 25 January 1993 through 25 January 1993
ER -