@inproceedings{614a1874344e4e8c98e5cb826630be02,
title = "Ultrafast Metal-Semiconductor-Metal Photodetectors with Nanometer Scale Finger Spacing and Width",
abstract = "We report the fabrication and measurement of ultrafast nanoscale metal-semiconductor-metal photodetectors. The finger spacing and width as small as 25 nm are fabricated using electron beam lithography. Electrooptic sampling was performed at various wavelengths to measure the detectors' response time. The fastest detectors have response times and 3-dB bandwidths of 0.87 ps and 510 GHz on low-temperature GaAs, 1.5 ps and 300 GHz on bulk GaAs, and 3.7 ps and 110 GHz on bulk Si. To our knowledge, they are the fastest photodetectors of their kind. Scaling rules are also proposed.",
author = "Liu, {Mark Y.} and Chou, {Stephen Y.} and Sotiris Alexandrou and Hsiang, {Thomas Y.}",
note = "Publisher Copyright: {\textcopyright} 1993 Optical Society of America.; Ultrafast Electronics and Optoelectronics, UEO 1993 ; Conference date: 25-01-1993 Through 25-01-1993",
year = "1993",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
pages = "53--55",
booktitle = "Ultrafast Electronics and Optoelectronics, UEO 1993",
}