We report a method of one-step direct patterning of metallic nanostructures. In the method, termed laser assisted direct imprinting(LADI), the surface of a metal film on a substrate is melted by a single excimer laser pulse and subsequently imprinted within ∼100ns using a transparent quartz mold, while the substrate is kept at a low temperature and in a solid phase. Using LADI, we imprinted gratings with ∼100nm linewidth, 100nm depth, and 200nm pitch, as well as isolated mesas of ∼20νm size, in Al, Au, Cu and Ni thin films. We found that the quartz mold was able to imprint metals even at temperatures higher than its melting point. The technique could be extended to other metals regardless of their ductility and hardness, and would find applications in photonic and plasmonic device production.
|Original language||English (US)|
|State||Published - 2010|
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering