Ultrafast and direct imprint of nanostructures in silicon

Engineering

• Nanometre 100%
• High Resolution 50%
• Lithography 50%
• Liquid Layer 50%
• Processing Technique 50%
• Excimer Laser 50%
• Surface Layer 50%

Material Science

• Silicon 100%
• Nanocrystalline Material 100%
• Laser Pulse 16%
• Self Assembly 16%
• Lithography 16%

Keyphrases

• Rapid Techniques 33%
• Molten Silicon 33%
• Thin Surface Layer 33%