Two-dimensional argon-ion velocity distributions in the expansion region of a helicon plasma source

Ioana A. Biloiu; Earl E. Scime; Costel Biloiu; Samuel A. Cohen

doi:10.1109/TPS.2008.917778

Two-dimensional argon-ion velocity distributions in the expansion region of a helicon plasma source

Ioana A. Biloiu
, Earl E. Scime
, Costel Biloiu
, Samuel A. Cohen

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Two-dimensional argon ion velocity distribution functions in the expansion region of a helicon plasma source have been obtained by laser-induced-fluorescence tomography. Below a threshold value of the magnetic field in the expansion region, a fast ion population moving away from the source appears in addition to the nearly isotropic, slow, background, ion population.

Original language	English (US)
Pages (from-to)	1216-1217
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	36
Issue number	4 PART 1
DOIs	https://doi.org/10.1109/TPS.2008.917778
State	Published - Aug 2008

All Science Journal Classification (ASJC) codes

Nuclear and High Energy Physics
Condensed Matter Physics

Keywords

Electric double layer
Helicon plasma
Ion beam
Ion velocity distribution function
Laser induced fluorescence tomography

Access to Document

10.1109/TPS.2008.917778

Cite this

@article{63504a93c362492992f77bacba4b77fa,

title = "Two-dimensional argon-ion velocity distributions in the expansion region of a helicon plasma source",

abstract = "Two-dimensional argon ion velocity distribution functions in the expansion region of a helicon plasma source have been obtained by laser-induced-fluorescence tomography. Below a threshold value of the magnetic field in the expansion region, a fast ion population moving away from the source appears in addition to the nearly isotropic, slow, background, ion population.",

keywords = "Electric double layer, Helicon plasma, Ion beam, Ion velocity distribution function, Laser induced fluorescence tomography",

author = "Biloiu, \{Ioana A.\} and Scime, \{Earl E.\} and Costel Biloiu and Cohen, \{Samuel A.\}",

note = "Funding Information: Manuscript received November 29, 2007; revised January 10, 2008. I. A. Biloiu and E. E. Scime are with the Department of Physics, West Virginia University, Morgantown, WV 26506-6315 USA (e-mail: ibiloiu@mix. wvu.edu). C. Biloiu is with Varian Semiconductor Equipment Associates, Gloucester, MA 01930 USA. S. A. Cohen is with Princeton Plasma Physics Laboratory, Princeton, NJ 08543 USA. Work was supported by the NSF Grant PHY-0611571. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2008.917778",

year = "2008",

month = aug,

doi = "10.1109/TPS.2008.917778",

language = "English (US)",

volume = "36",

pages = "1216--1217",

journal = "IEEE Transactions on Plasma Science",

issn = "0093-3813",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4 PART 1",

}

TY - JOUR

T1 - Two-dimensional argon-ion velocity distributions in the expansion region of a helicon plasma source

AU - Biloiu, Ioana A.

AU - Scime, Earl E.

AU - Biloiu, Costel

AU - Cohen, Samuel A.

N1 - Funding Information: Manuscript received November 29, 2007; revised January 10, 2008. I. A. Biloiu and E. E. Scime are with the Department of Physics, West Virginia University, Morgantown, WV 26506-6315 USA (e-mail: ibiloiu@mix. wvu.edu). C. Biloiu is with Varian Semiconductor Equipment Associates, Gloucester, MA 01930 USA. S. A. Cohen is with Princeton Plasma Physics Laboratory, Princeton, NJ 08543 USA. Work was supported by the NSF Grant PHY-0611571. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TPS.2008.917778

PY - 2008/8

Y1 - 2008/8

N2 - Two-dimensional argon ion velocity distribution functions in the expansion region of a helicon plasma source have been obtained by laser-induced-fluorescence tomography. Below a threshold value of the magnetic field in the expansion region, a fast ion population moving away from the source appears in addition to the nearly isotropic, slow, background, ion population.

AB - Two-dimensional argon ion velocity distribution functions in the expansion region of a helicon plasma source have been obtained by laser-induced-fluorescence tomography. Below a threshold value of the magnetic field in the expansion region, a fast ion population moving away from the source appears in addition to the nearly isotropic, slow, background, ion population.

KW - Electric double layer

KW - Helicon plasma

KW - Ion beam

KW - Ion velocity distribution function

KW - Laser induced fluorescence tomography

UR - https://www.scopus.com/pages/publications/50249108857

UR - https://www.scopus.com/pages/publications/50249108857#tab=citedBy

U2 - 10.1109/TPS.2008.917778

DO - 10.1109/TPS.2008.917778

M3 - Article

AN - SCOPUS:50249108857

SN - 0093-3813

VL - 36

SP - 1216

EP - 1217

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

IS - 4 PART 1

ER -

Two-dimensional argon-ion velocity distributions in the expansion region of a helicon plasma source

Abstract

All Science Journal Classification (ASJC) codes

Keywords

Access to Document

Other files and links

Fingerprint

Cite this