Transition edge sensor focal plane arrays for the BICEP2, keck, and spider CMB polarimeters

J. A. Bonetti, A. D. Turner, M. Kenyon, H. G. LeDuc, J. A. Brevik, A. Orlando, A. Trangsrud, R. Sudiwala, H. T. Nguyen, P. K. Day, J. J. Bock, S. R. Golwala, J. M. Kovac, W. C. Jones, C. L. Kuo

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