Trace-gas spectroscopy of methane using a monolithically integrated silicon photonic chip sensor

  • Eric J. Zhang
  • , Yves Martin
  • , Jason S. Orcutt
  • , Chi Xiong
  • , Martin Glodde
  • , Tymon Barwicz
  • , Laurent Schares
  • , Elizabeth A. Duch
  • , Nathan Marchack
  • , Chu C. Teng
  • , Gerard Wysocki
  • , William M.J. Green

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

We present a monolithically integrated photonic sensor incorporating an on-chip III-V laser, detector, sealed reference cell, and sensing waveguide capable of near-infrared absorption spectroscopy of methane near λ = 1651 nm. Sub-100 ppmv∙Hz-1/2 sensitivities are demonstrated.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2019
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580576
DOIs
StatePublished - 2019
EventCLEO: Science and Innovations, CLEO_SI 2019 - San Jose, United States
Duration: May 5 2019May 10 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F129-CLEO_SI 2019
ISSN (Electronic)2162-2701

Conference

ConferenceCLEO: Science and Innovations, CLEO_SI 2019
Country/TerritoryUnited States
CitySan Jose
Period5/5/195/10/19

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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