@inproceedings{c76f9fc622a54830b9f5001e0f58b592,
title = "Trace-gas spectroscopy of methane using a monolithically integrated silicon photonic chip sensor",
abstract = "We present a monolithically integrated photonic sensor incorporating an on-chip III-V laser, detector, sealed reference cell, and sensing waveguide capable of near-infrared absorption spectroscopy of methane near λ = 1651 nm. Sub-100 ppmv∙Hz-1/2 sensitivities are demonstrated.",
author = "Zhang, {Eric J.} and Yves Martin and Orcutt, {Jason S.} and Chi Xiong and Martin Glodde and Tymon Barwicz and Laurent Schares and Duch, {Elizabeth A.} and Nathan Marchack and Teng, {Chu C.} and Gerard Wysocki and Green, {William M.J.}",
note = "Funding Information: Acknowledgements: The information, data, or work presented herein was funded in part by the Advanced Research Projects Agency-Energy (ARPA-E), U.S. Department of Energy, under Award Number DE-AR0000540. The views and opinions of authors expressed herein do not necessarily state or reflect those of the United States Government or any agency thereof. The authors recognize the staff at the IBM Microelectronics Research Laboratory and Central Scientific Services for their assistance with sensor fabrication and assembly. They would also like to thank Levente Klein, Theodore van Kessel, Ramachandran Muralidhar, Norma Sosa, and Hendrik Hamann for productive discussions. Publisher Copyright: {\textcopyright} 2019 The Author(s); CLEO: Science and Innovations, CLEO_SI 2019 ; Conference date: 05-05-2019 Through 10-05-2019",
year = "2019",
doi = "10.1364/CLEO_SI.2019.STh1F.2",
language = "English (US)",
isbn = "9781943580576",
series = "Optics InfoBase Conference Papers",
publisher = "OSA - The Optical Society",
booktitle = "CLEO",
}