Trace-gas spectroscopy of methane using a monolithically integrated silicon photonic chip sensor

Eric J. Zhang, Yves Martin, Jason S. Orcutt, Chi Xiong, Martin Glodde, Tymon Barwicz, Laurent Schares, Elizabeth A. Duch, Nathan Marchack, Chu C. Teng, Gerard Wysocki, William M.J. Green

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We present a monolithically integrated photonic sensor incorporating an on-chip III-V laser, detector, sealed reference cell, and sensing waveguide capable of near-infrared absorption spectroscopy of methane near λ = 1651 nm. Sub-100 ppmv∙Hz-1/2 sensitivities are demonstrated.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2019
PublisherOSA - The Optical Society
ISBN (Print)9781943580576
DOIs
StatePublished - 2019
EventCLEO: Science and Innovations, CLEO_SI 2019 - San Jose, United States
Duration: May 5 2019May 10 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F129-CLEO_SI 2019

Conference

ConferenceCLEO: Science and Innovations, CLEO_SI 2019
CountryUnited States
CitySan Jose
Period5/5/195/10/19

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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