Abstract
We found threshold voltage sensitivity to silicon thickness variation in 0.1 µm channel length fully-depleted SOI NMOSFET's can be reduced with lightly-doped channel and back-gate bias. However, after the back-interface is accumulated, the reduction is small and threshold voltage roll-off due to high drain bias increases.
Original language | English (US) |
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Pages (from-to) | 1707-1709 |
Number of pages | 3 |
Journal | IEEE Transactions on Electron Devices |
Volume | 42 |
Issue number | 9 |
DOIs | |
State | Published - Sep 1995 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering