Fingerprint
Dive into the research topics of 'Thin, highly doped layers of epitaxial silicon deposited by limited reaction processing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Thin, highly doped layers of epitaxial silicon deposited by limited reaction processing
C. M. Gronet, J. C. Sturm, K. E. Williams, J. F. Gibbons, S. D. Wilson
Research output: Contribution to journal › Article › peer-review
38
Scopus
citations