We report structural, electrical, and thermopower properties of epitaxial and topotaxial Na xCoO 2 thin films on (0001) sapphire substrate. Topotaxial Na xCoO 2 films were prepared by converting an epitaxial Co 3O 4 film to Na xCoO 2 by annealing in Na vapor and epitaxial Na xCoO 2 films were obtained by pulsed laser deposition. All the films are c-axis oriented. For topotaxial films, annealing in different Na vapor pressures resulted in films with different Na concentrations, which showed distinct transport properties. For directly deposited epitaxial films by pulsed laser deposition, deposition parameters are found to control the Na concentration and hence the film properties. The largest thermoelectric power of the samples made by different methods is found to be similar in the range of 70-100 μV/K at room temperature.