Thermal stability of Si/Si1-x-yGexCy/Si quantum wells grown by rapid thermal chemical vapor deposition

C. W. Liu, Y. D. Tseng, M. Y. Chern, C. L. Chang, J. C. Sturm

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Fingerprint

Dive into the research topics of 'Thermal stability of Si/Si<sub>1-x-y</sub>Ge<sub>x</sub>C<sub>y</sub>/Si quantum wells grown by rapid thermal chemical vapor deposition'. Together they form a unique fingerprint.

Physics & Astronomy