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Thermal stability and substitutional carbon incorporation far above solid-solubility in Si1-xCx and Si1-x-yGexCy layers grown by chemical vapor deposition using disilane

  • M. S. Carroll
  • , J. C. Sturm
  • , E. Napolitani
  • , D. De Salvador
  • , M. Berti

Research output: Contribution to journal › Conference article › peer-review

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