Thermal conductivity measurements on suspended diamond membranes using picosecond and femtosecond time-domain thermoreflectance

Ramez Cheaito, Aditya Sood, Luke Yates, Thomas L. Bougher, Zhe Cheng, Mehdi Asheghi, Samuel Graham, Kenneth Goodson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

We report on the room temperature in-plane thermal conductivity measurements on a 1-micrometer thick suspended diamond membrane grown by chemical vapor deposition using two different time domain thermoreflectance (TDTR) setups. The first setup is at Stanford University and the second is at Georgia Institute of Technology. Despite the differences between the two setups and the difficulty associated with diamond membranes thermal measurements, we demonstrate excellent repeatability from each setup and a very good agreement between the two setups. The paper outlines steps considered by both groups to minimize the measurement uncertainty and achieve such agreement. The measurement results show that the thermal conductivity displays a large variability across the membrane. The sensitivity and uncertainty analyses suggest that this variability could be a result of the nonuniformity in the diamond and aluminum coating thicknesses across the sample.

Original languageEnglish (US)
Title of host publicationProceedings of the 16th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages706-710
Number of pages5
ISBN (Electronic)9781509029945
DOIs
StatePublished - Jul 25 2017
Externally publishedYes
Event16th IEEE InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2017 - Orlando, United States
Duration: May 30 2017Jun 2 2017

Publication series

NameProceedings of the 16th InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2017

Conference

Conference16th IEEE InterSociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, ITherm 2017
Country/TerritoryUnited States
CityOrlando
Period5/30/176/2/17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Fluid Flow and Transfer Processes
  • Electrical and Electronic Engineering

Keywords

  • CVD diamond
  • Thermal conductivity
  • Time domain thermoreflectance

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