Thermal conduction inhomogeneity of nanocrystalline diamond films by dual-side thermoreflectance

Elah Bozorg-Grayeli, Aditya Sood, Mehdi Asheghi, Vincent Gambin, Rajinder Sandhu, Tatyana I. Feygelson, Bradford B. Pate, Karl Hobart, Kenneth E. Goodson

Research output: Contribution to journalArticlepeer-review

39 Scopus citations

Abstract

Thin diamond films of thickness near 1 μm can have highly nonuniform thermal conductivities owing to spatially varying disorder associated with nucleation and grain coalescence. Here, we examine the nonuniformity for nanocrystalline chemical vapor deposited diamond films of thickness 0.5, 1.0, and 5.6 μm using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The extracted local thermal conductivities vary from less than 100 W m-1 K-1 to more than 1300 W m-1 K-1 and suggest that the most defective material is confined to within 1 μm of the growth surface.

Original languageEnglish (US)
Article number111907
JournalApplied Physics Letters
Volume102
Issue number11
DOIs
StatePublished - Mar 18 2013
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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