Thermal conduction inhomogeneity of nanocrystalline diamond films by dual-side thermoreflectance

Elah Bozorg-Grayeli; Aditya Sood; Mehdi Asheghi; Vincent Gambin; Rajinder Sandhu; Tatyana I. Feygelson; Bradford B. Pate; Karl Hobart; Kenneth E. Goodson

doi:10.1063/1.4796168

Thermal conduction inhomogeneity of nanocrystalline diamond films by dual-side thermoreflectance

Elah Bozorg-Grayeli, Aditya Sood, Mehdi Asheghi, Vincent Gambin, Rajinder Sandhu, Tatyana I. Feygelson, Bradford B. Pate, Karl Hobart, Kenneth E. Goodson

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

Thin diamond films of thickness near 1 μm can have highly nonuniform thermal conductivities owing to spatially varying disorder associated with nucleation and grain coalescence. Here, we examine the nonuniformity for nanocrystalline chemical vapor deposited diamond films of thickness 0.5, 1.0, and 5.6 μm using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The extracted local thermal conductivities vary from less than 100 W m^-1 K^-1 to more than 1300 W m^-1 K^-1 and suggest that the most defective material is confined to within 1 μm of the growth surface.

Original language	English (US)
Article number	111907
Journal	Applied Physics Letters
Volume	102
Issue number	11
DOIs	https://doi.org/10.1063/1.4796168
State	Published - Mar 18 2013
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.4796168

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title = "Thermal conduction inhomogeneity of nanocrystalline diamond films by dual-side thermoreflectance",

abstract = "Thin diamond films of thickness near 1 μm can have highly nonuniform thermal conductivities owing to spatially varying disorder associated with nucleation and grain coalescence. Here, we examine the nonuniformity for nanocrystalline chemical vapor deposited diamond films of thickness 0.5, 1.0, and 5.6 μm using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The extracted local thermal conductivities vary from less than 100 W m-1 K-1 to more than 1300 W m-1 K-1 and suggest that the most defective material is confined to within 1 μm of the growth surface.",

author = "Elah Bozorg-Grayeli and Aditya Sood and Mehdi Asheghi and Vincent Gambin and Rajinder Sandhu and Feygelson, {Tatyana I.} and Pate, {Bradford B.} and Karl Hobart and Goodson, {Kenneth E.}",

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AU - Bozorg-Grayeli, Elah

AU - Sood, Aditya

AU - Asheghi, Mehdi

AU - Gambin, Vincent

AU - Sandhu, Rajinder

AU - Feygelson, Tatyana I.

AU - Pate, Bradford B.

AU - Hobart, Karl

AU - Goodson, Kenneth E.

PY - 2013/3/18

Y1 - 2013/3/18

N2 - Thin diamond films of thickness near 1 μm can have highly nonuniform thermal conductivities owing to spatially varying disorder associated with nucleation and grain coalescence. Here, we examine the nonuniformity for nanocrystalline chemical vapor deposited diamond films of thickness 0.5, 1.0, and 5.6 μm using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The extracted local thermal conductivities vary from less than 100 W m-1 K-1 to more than 1300 W m-1 K-1 and suggest that the most defective material is confined to within 1 μm of the growth surface.

AB - Thin diamond films of thickness near 1 μm can have highly nonuniform thermal conductivities owing to spatially varying disorder associated with nucleation and grain coalescence. Here, we examine the nonuniformity for nanocrystalline chemical vapor deposited diamond films of thickness 0.5, 1.0, and 5.6 μm using picosecond thermoreflectance from both the top and bottom diamond surfaces, enabled by etching a window in the silicon substrate. The extracted local thermal conductivities vary from less than 100 W m-1 K-1 to more than 1300 W m-1 K-1 and suggest that the most defective material is confined to within 1 μm of the growth surface.

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Thermal conduction inhomogeneity of nanocrystalline diamond films by dual-side thermoreflectance

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