Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass

Adela Ben-Yakar, Anthony Harkin, Jacqueline Ashmore, Mengyan Shen, Eric Mazur, Robert L. Byer, Howard A. Stone

Research output: Contribution to journalConference article

7 Scopus citations

Abstract

Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.

Original languageEnglish (US)
Pages (from-to)335-345
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4977
DOIs
StatePublished - Dec 5 2003
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States
Duration: Jan 27 2003Jan 30 2003

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Ablation
  • Borosilicate
  • Femtosecond
  • Glass
  • Laser
  • Microchannels
  • Microfabrication
  • Microfluidics
  • Rim
  • Thin film

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