Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass

Adela Ben-Yakar; Anthony Harkin; Jacqueline Ashmore; Mengyan Shen; Eric Mazur; Robert L. Byer; Howard A. Stone

doi:10.1117/12.479527

Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass

Adela Ben-Yakar, Anthony Harkin, Jacqueline Ashmore, Mengyan Shen, Eric Mazur, Robert L. Byer, Howard A. Stone

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.

Original language	English (US)
Pages (from-to)	335-345
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4977
DOIs	https://doi.org/10.1117/12.479527
State	Published - 2003
Event	PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States Duration: Jan 27 2003 → Jan 30 2003

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

Ablation
Borosilicate
Femtosecond
Glass
Laser
Microchannels
Microfabrication
Microfluidics
Rim
Thin film

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10.1117/12.479527

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title = "Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass",

abstract = "Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.",

keywords = "Ablation, Borosilicate, Femtosecond, Glass, Laser, Microchannels, Microfabrication, Microfluidics, Rim, Thin film",

author = "Adela Ben-Yakar and Anthony Harkin and Jacqueline Ashmore and Mengyan Shen and Eric Mazur and Byer, {Robert L.} and Stone, {Howard A.}",

year = "2003",

doi = "10.1117/12.479527",

language = "English (US)",

volume = "4977",

pages = "335--345",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II ; Conference date: 27-01-2003 Through 30-01-2003",

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TY - JOUR

T1 - Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass

AU - Ben-Yakar, Adela

AU - Harkin, Anthony

AU - Ashmore, Jacqueline

AU - Shen, Mengyan

AU - Mazur, Eric

AU - Byer, Robert L.

AU - Stone, Howard A.

PY - 2003

Y1 - 2003

N2 - Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.

AB - Microfluidic channels on borosilicate glass are machined using femtosecond lasers. The morphology of the ablated surface is studied using scanning microscopy. The results show micron scale features inside the channels. The formation mechanism of these features is investigated by additional experiments accompanied by a theoretical analysis of the thermal and fluid processes involved in the ultrafast laser ablation process. These studies indicate the existence of a very thin melting zone on glass and suggest that the surface morphology is formed by the plasma pressure-driven fluid motion of the melting zone during the ablation process.

KW - Ablation

KW - Borosilicate

KW - Femtosecond

KW - Glass

KW - Laser

KW - Microchannels

KW - Microfabrication

KW - Microfluidics

KW - Rim

KW - Thin film

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U2 - 10.1117/12.479527

DO - 10.1117/12.479527

M3 - Conference article

AN - SCOPUS:0345724868

SN - 0277-786X

VL - 4977

SP - 335

EP - 345

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II

Y2 - 27 January 2003 through 30 January 2003

ER -

Thermal and fluid processes of a thin melt zone during femtosecond laser ablation of glass

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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