The fabrication of periodic metal nanodot arrays through pulsed laser melting induced fragmentation of metal nanogratings

Qiangfei Xia, Stephen Y. Chou

Research output: Contribution to journalArticle

23 Scopus citations

Abstract

We propose and demonstrate a new method for fabricating periodic arrays of metal nanodots over a large area. In this method, metal nanogratings were first patterned on a substrate by nanoimprint lithography and lift-off, and were then melted using a single excimer laser pulse. We found that the laser melting broke the metal nanogratings into periodic nanodots. Furthermore, we demonstrated the control of the nanodot array pitch using a substrate surface topology, and the fabrication of two-dimensional periodic metal nanodot arrays of 70nm diameter and 200nm period. The fragmentation of lines into dots was attributed to the Rayleigh instability in a liquid cylinder.

Original languageEnglish (US)
Article number285310
JournalNanotechnology
Volume20
Issue number28
DOIs
StatePublished - Jul 31 2009

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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