@inproceedings{0fda877e9e0b4f5dab69cd5a205d4037,
title = "The Casimir effect between micromechanical components on a silicon chip",
abstract = "The Casimir force originates from quantum fluctuations. While this force is too weak to have any measurable effects between objects at separations larger than 10 μm it dominates the interaction between electrically neutral surfaces at the nanoscale. By fabricating a doubly clamped microbeam for sensing the force and a comb actuator to control the distance, we demonstrate that the Casimir force can become the dominant interaction between components within the same silicon chip.",
keywords = "Casimir forces, force sensors, quantum fluctuations, surface interactions",
author = "Chan, {H. B.} and J. Zou and Z. Marcet and Rodriguez, {A. W.} and Reid, {M. T.H.} and McCauley, {A. P.} and Kravchenko, {I. I.I.} and T. Lu and Y. Bao and Johnson, {S. G.}",
note = "Publisher Copyright: {\textcopyright} 2014 University of Strathclyde.; 2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 ; Conference date: 17-08-2014 Through 21-08-2014",
year = "2014",
month = oct,
day = "14",
doi = "10.1109/OMN.2014.6924543",
language = "English (US)",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
pages = "61--62",
booktitle = "2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings",
address = "United States",
}