Tera-hertz GaAs metal-semiconductor-metal photodetectors with nanoscale finger spacing and width

Stephen Y. Chou, Y. Liu, P. B. Fischer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Metal-semiconductor-metal (MSM) photodetectors with nanoscale finger spacing and finger width have been fabricated on MBE (molecular beam epitaxy)-grown GaAs. The smallest finger spacing and width are 25 nm and 15 nm, respectively. Direct dynamic measurement using a femtosecond pulse laser and a 50-GHz sampling oscilloscope showed that the detectors' speed is much faster than that of the measuring system. Monte Carlo simulations show that, for an MSM photodetector with 25-nm finger spacing, its intrinsic and extrinsic impulse responses are 0.16 ps and 0.25 ps, respectively, and its cut-off frequency is over 1 THz. Finally, the scaling rules in achieving ultra-high-speed MSM photodetectors are discussed.

Original languageEnglish (US)
Title of host publicationInternational Electron Devices Meeting 1991, IEDM 1991
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages745-748
Number of pages4
Volume1991-January
ISBN (Electronic)0780302435
DOIs
StatePublished - Jan 1 1991
Externally publishedYes
EventInternational Electron Devices Meeting, IEDM 1991 - Washington, United States
Duration: Dec 8 1991Dec 11 1991

Other

OtherInternational Electron Devices Meeting, IEDM 1991
CountryUnited States
CityWashington
Period12/8/9112/11/91

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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    Chou, S. Y., Liu, Y., & Fischer, P. B. (1991). Tera-hertz GaAs metal-semiconductor-metal photodetectors with nanoscale finger spacing and width. In International Electron Devices Meeting 1991, IEDM 1991 (Vol. 1991-January, pp. 745-748). [235316] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IEDM.1991.235316