Tera-hertz GaAs metal-semiconductor-metal photodetectors with nanoscale finger spacing and width

S. Y. Chou, Y. Liu, P. B. Fischer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

Metal-semiconductor-metal (MSM) photodetectors with nanoscale finger spacing and finger width have been fabricated on MBE (molecular beam epitaxy)-grown GaAs. The smallest finger spacing and width are 25 nm and 15 nm, respectively. Direct dynamic measurement using a femtosecond pulse laser and a 50-GHz sampling oscilloscope showed that the detectors' speed is much faster than that of the measuring system. Monte Carlo simulations show that, for an MSM photodetector with 25-nm finger spacing, its intrinsic and extrinsic impulse responses are 0.16 ps and 0.25 ps, respectively, and its cut-off frequency is over 1 THz. Finally, the scaling rules in achieving ultra-high-speed MSM photodetectors are discussed.

Original languageEnglish (US)
Title of host publicationInternational Electron Devices Meeting 1991, IEDM 1991
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages745-748
Number of pages4
ISBN (Electronic)0780302435
DOIs
StatePublished - 1991
Externally publishedYes
EventInternational Electron Devices Meeting, IEDM 1991 - Washington, United States
Duration: Dec 8 1991Dec 11 1991

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
Volume1991-January
ISSN (Print)0163-1918

Other

OtherInternational Electron Devices Meeting, IEDM 1991
CountryUnited States
CityWashington
Period12/8/9112/11/91

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

Keywords

  • Fingers
  • Gallium arsenide
  • Laser beam cutting
  • Molecular beam epitaxial growth
  • Optical pulses
  • Oscilloscopes
  • Photodetectors
  • Pulse measurements
  • Sampling methods
  • Velocity measurement

Fingerprint Dive into the research topics of 'Tera-hertz GaAs metal-semiconductor-metal photodetectors with nanoscale finger spacing and width'. Together they form a unique fingerprint.

Cite this