Temperature and Composition Dependent Structures of SixGe1-x/Si and SLGeiv/Ge Superlattices

Lawrence E. Carter, Paul C. Weakliem, Emily A. Carter

Research output: Contribution to journalArticle

2 Scopus citations

Abstract

We have investigated the equilibrium structures of thin-layer SixGe1-x/Si and SixGe1-x/Ge superlattices as a function of composition and temperature using a Monte Carlo simulation technique combined with a many-body empirical potential. In general, the alloy layers are found to adopt an overall random structure at equilibrium. Some segregation of Ge to the interface is found to occur at room temperature in superlattices containing pure Si layers and high Ge content in the alloy. The alloy lattice is highly sensitive to the degree of strain imposed by the Si or Ge substrate: We observe a significant expansion or compression of the alloy lattice perpendicular to the interface as a means of relieving the imposed strain.

Original languageEnglish (US)
Pages (from-to)2059-2066
Number of pages8
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume11
Issue number4
DOIs
StatePublished - Jan 1 1993
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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