TECHNIQUE FOR RADIATION EFFECTS MEASUREMENTS OF SOI.

Keyphrases

• Effect Measurement 100%
• Radiation Effects 100%
• Silicon-on-insulator 100%
• Interface States 33%
• Radiation Response 33%
• State of Charge 33%
• Deconvolution 33%
• Voltage Data 33%
• Melt-recrystallization 33%
• Capacitance-voltage 33%
• Silicon-on-insulator Structure 33%
• Capacitance-voltage Curve 33%
• Oxide Trapped Charge 33%
• Total Dose Effects 33%

Engineering

• Radiation Effect 100%
• Silicon on Insulator 100%
• Silicon on Insulator Material 100%
• Deconvolution 50%
• Interface State 50%
• Charge State 50%

Material Science

• Silicon 100%
• Capacitance 100%
• Silicon on Insulator Material 100%
• Oxide Compound 50%