TY - GEN
T1 - TCAD structure synthesis and capacitance extraction of a voltage-controlled oscillator using automated layout-to-device synthesis methodology
AU - Bhattacharya, Debajit
AU - Joshi, Rajiv V.
AU - Ainspan, Herschel A.
AU - Sathaye, Ninad D.
AU - Bajaj, Mohit
AU - Gundapaneni, Suresh
AU - Jha, Niraj K.
N1 - Publisher Copyright:
© 2014 IEEE.
PY - 2014/11/4
Y1 - 2014/11/4
N2 - With continued scaling of bulk CMOS devices in the nanometer regime, technology computer-aided design (TCAD) assisted extraction of parasitic capacitances has gained importance for predicting the transient behavior of VLSI circuits. In this paper, we present a TCAD structure synthesis and capacitance extraction methodology in a 22nm CMOS process and report parasitic capacitances that affect the oscillation frequency of a 10 GHz voltage-controlled oscillator (VCO). We observe that front-end capacitances are becoming overwhelmingly dominant at nanometer nodes. We quantify the capacitive interactions between the front-end and back-end features using a layer-by-layer capacitance analysis. The estimated frequency tuning range is in agreement with the tuning range of a 22nm VCO hardware.
AB - With continued scaling of bulk CMOS devices in the nanometer regime, technology computer-aided design (TCAD) assisted extraction of parasitic capacitances has gained importance for predicting the transient behavior of VLSI circuits. In this paper, we present a TCAD structure synthesis and capacitance extraction methodology in a 22nm CMOS process and report parasitic capacitances that affect the oscillation frequency of a 10 GHz voltage-controlled oscillator (VCO). We observe that front-end capacitances are becoming overwhelmingly dominant at nanometer nodes. We quantify the capacitive interactions between the front-end and back-end features using a layer-by-layer capacitance analysis. The estimated frequency tuning range is in agreement with the tuning range of a 22nm VCO hardware.
UR - http://www.scopus.com/inward/record.url?scp=84928139449&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84928139449&partnerID=8YFLogxK
U2 - 10.1109/CICC.2014.6945998
DO - 10.1109/CICC.2014.6945998
M3 - Conference contribution
AN - SCOPUS:84928139449
T3 - Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014
BT - Proceedings of the IEEE 2014 Custom Integrated Circuits Conference, CICC 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 36th Annual Custom Integrated Circuits Conference - The Showcase for Integrated Circuit Design in the Heart of Silicon Valley, CICC 2014
Y2 - 15 September 2014 through 17 September 2014
ER -