TCAD-Assisted Capacitance Extraction of FinFET SRAM and Logic Arrays

Debajit Bhattacharya, Niraj K. Jha

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


Technology computer-aided design (TCAD)-assisted automation of structure synthesis followed by a transport-analysis-based capacitance extraction approach has been shown to have a significant potential in the recent past in terms of both accuracy and efficiency. In this brief, we first propose three methods to speedup TCAD-assisted capacitance extraction of an SRAM array layout, by partitioning the layout into several fragments. We demonstrate that the speedup of these partitioning methods, relative to that of TCAD-assisted full-array capacitance extraction method, can be as high as 17×, with an average of 3×. On the other hand, the error in capacitance derived using the partitioning methods can be as low as 1.01%, with an average of 4.93%. We apply the partitioning methods to several layout configurations and styles of FinFET SRAM array layouts and demonstrate their efficacy. We then apply the partitioning methods to a ring oscillator, register, and two-bit adder, and demonstrate similar results.

Original languageEnglish (US)
Article number7047918
Pages (from-to)329-333
Number of pages5
JournalIEEE Transactions on Very Large Scale Integration (VLSI) Systems
Issue number1
StatePublished - Jan 2016

All Science Journal Classification (ASJC) codes

  • Software
  • Hardware and Architecture
  • Electrical and Electronic Engineering


  • FinFET
  • SRAM
  • parasitic extraction
  • structure synthesis
  • technology computer-aided design (TCAD)


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