Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition

S. M. Allameh, N. Yao, W. O. Soboyejo

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

This paper presents the results of recent experiments that lead to the nanofabrication of hollow platinum structures in a focused ion beam microscope. The inclination of the substrate with respect to the ion beam is shown to control the growth direction of Pt on the surface of polysilicon.

Original languageEnglish (US)
Pages (from-to)915-919
Number of pages5
JournalScripta Materialia
Volume50
Issue number6
DOIs
StatePublished - Mar 2004

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys

Keywords

  • Ion-beam processing
  • Nanostructures
  • Platinum
  • Thin films

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