Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition

S. M. Allameh; N. Yao; W. O. Soboyejo

doi:10.1016/j.scriptamat.2003.05.001

Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition

S. M. Allameh, N. Yao, W. O. Soboyejo

Princeton Materials Institute

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

This paper presents the results of recent experiments that lead to the nanofabrication of hollow platinum structures in a focused ion beam microscope. The inclination of the substrate with respect to the ion beam is shown to control the growth direction of Pt on the surface of polysilicon.

Original language	English (US)
Pages (from-to)	915-919
Number of pages	5
Journal	Scripta Materialia
Volume	50
Issue number	6
DOIs	https://doi.org/10.1016/j.scriptamat.2003.05.001
State	Published - Mar 2004

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
Metals and Alloys

Keywords

Ion-beam processing
Nanostructures
Platinum
Thin films

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10.1016/j.scriptamat.2003.05.001

Cite this

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title = "Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition",

abstract = "This paper presents the results of recent experiments that lead to the nanofabrication of hollow platinum structures in a focused ion beam microscope. The inclination of the substrate with respect to the ion beam is shown to control the growth direction of Pt on the surface of polysilicon.",

keywords = "Ion-beam processing, Nanostructures, Platinum, Thin films",

author = "Allameh, {S. M.} and N. Yao and Soboyejo, {W. O.}",

note = "Funding Information: This research was supported by the National Science Foundation. The authors are grateful to the Program Managers, Dr. Carmen Huber and Ms. Pat Tsuchitani, for their encouragement and support.",

year = "2004",

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doi = "10.1016/j.scriptamat.2003.05.001",

language = "English (US)",

volume = "50",

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T1 - Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition

AU - Allameh, S. M.

AU - Yao, N.

AU - Soboyejo, W. O.

N1 - Funding Information: This research was supported by the National Science Foundation. The authors are grateful to the Program Managers, Dr. Carmen Huber and Ms. Pat Tsuchitani, for their encouragement and support.

PY - 2004/3

Y1 - 2004/3

N2 - This paper presents the results of recent experiments that lead to the nanofabrication of hollow platinum structures in a focused ion beam microscope. The inclination of the substrate with respect to the ion beam is shown to control the growth direction of Pt on the surface of polysilicon.

AB - This paper presents the results of recent experiments that lead to the nanofabrication of hollow platinum structures in a focused ion beam microscope. The inclination of the substrate with respect to the ion beam is shown to control the growth direction of Pt on the surface of polysilicon.

KW - Ion-beam processing

KW - Nanostructures

KW - Platinum

KW - Thin films

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M3 - Article

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JO - Scripta Materialia

JF - Scripta Materialia

IS - 6

ER -

Synthesis of self-assembled nanoscale structures by focused ion-beam induced deposition

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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