Synthesis of ozone at atmospheric pressure by a quenched induction-coupled plasma torch

The technical feasibility of using an induction-coupled plasma (ICP) torch to synthesize ozone at atmospheric pressure is explored. Ozone concentrations up to ∼250ppm were achieved using a thermal plasma reactor system based on an ICP torch operating at 2.5MHz and ∼11 kVA with an argon/oxygen mixture as the plasma-forming gas. The corresponding production rate and yield were ∼20 g ozone/hr and ∼2g ozone/kWh, respectively. A gaseous oxygen quench formed ozone by rapid mixing of molecular oxygen with atomic oxygen produced by the torch. The ozone concentration in the reaction chamber was measured by Fourier Transform infrared (FTIR) spectroscopy over a wide range of experimental conditions and configurations. The geometry of the quench gas flow, the quench flow velocity, and the quench flow rate played important roles in determining the ozone concentration. The ozone concentration was sensitive to the torch RF power, but was insensitive to the torch gas flow rates. These observations are interpreted within the framework of a simple model of ozone synthesis.