Synergistic effects of vacuum ultraviolet radiation, ion bombardment, and heating in 193 nm photoresist roughening and degradation

  • D. Nest
  • , D. B. Graves
  • , S. Engelmann
  • , R. L. Bruce
  • , F. Weilnboeck
  • , G. S. Oehrlein
  • , C. Andes
  • , E. A. Hudson

Research output: Contribution to journal › Article › peer-review

69 Scopus citations

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Keyphrases

Physics

Engineering

Material Science