Surface topography evolution and fatigue fracture of polysilicon

S. M. Allameh; P. Shrotriya; A. Butterwick; S. Brown; Nan Yao; W. Soboyejo

doi:10.1023/A:1026377522033

Surface topography evolution and fatigue fracture of polysilicon

S. M. Allameh, P. Shrotriya, A. Butterwick, S. Brown, Nan Yao, W. Soboyejo

Princeton Materials Institute

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

This paper presents the results of an experimental study of the micromechanisms of fatigue crack nucleation and fatigue fracture in polysilicon MEMS Structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO₂ layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are elucidated as functions of fatigue cycling before discussing the micromechanisms of crack growth and final fracture.

Original language	English (US)
Pages (from-to)	4145-4155
Number of pages	11
Journal	Journal of Materials Science
Volume	38
Issue number	20
DOIs	https://doi.org/10.1023/A:1026377522033
State	Published - Oct 15 2003

All Science Journal Classification (ASJC) codes

Mechanics of Materials
Ceramics and Composites
Mechanical Engineering
Polymers and Plastics
General Materials Science
Materials Science (miscellaneous)

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10.1023/A:1026377522033

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AU - Shrotriya, P.

AU - Butterwick, A.

AU - Brown, S.

AU - Yao, Nan

AU - Soboyejo, W.

PY - 2003/10/15

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N2 - This paper presents the results of an experimental study of the micromechanisms of fatigue crack nucleation and fatigue fracture in polysilicon MEMS Structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO2 layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are elucidated as functions of fatigue cycling before discussing the micromechanisms of crack growth and final fracture.

AB - This paper presents the results of an experimental study of the micromechanisms of fatigue crack nucleation and fatigue fracture in polysilicon MEMS Structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO2 layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are elucidated as functions of fatigue cycling before discussing the micromechanisms of crack growth and final fracture.

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Surface topography evolution and fatigue fracture of polysilicon

Abstract

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