Surface topography evolution and fatigue fracture of polysilicon

S. M. Allameh, P. Shrotriya, A. Butterwick, S. Brown, Nan Yao, W. Soboyejo

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Abstract

This paper presents the results of an experimental study of the micromechanisms of fatigue crack nucleation and fatigue fracture in polysilicon MEMS Structures. The initial stages of fatigue are shown to be associated with stress-assisted surface topography evolution and the thickening of SiO2 layers that form on the unpassivated polysilicon surfaces and crack/notch faces. The differences in surface topography and oxide thickness are elucidated as functions of fatigue cycling before discussing the micromechanisms of crack growth and final fracture.

Original languageEnglish (US)
Pages (from-to)4145-4155
Number of pages11
JournalJournal of Materials Science
Volume38
Issue number20
DOIs
StatePublished - Oct 15 2003

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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    Allameh, S. M., Shrotriya, P., Butterwick, A., Brown, S., Yao, N., & Soboyejo, W. (2003). Surface topography evolution and fatigue fracture of polysilicon. Journal of Materials Science, 38(20), 4145-4155. https://doi.org/10.1023/A:1026377522033