The surface loss coefficients of CFx and F radicals were measured on the steel walls of the differential pumping systems of plasma reactor. The beam to background signal ratio of the radicals was measured by appearance potential mass spectrometry. Observations revealed that the measured loss coefficients were lower than those reported on the surfaces, which were exposed to fluorocarbon plasmas. It was concluded that the loss coefficients of the species are dependent on the surface coverage of the radicals.
|Number of pages
|Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
|Published - Nov 2000
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films