Surface functionalization of 6H-SiC using organophosphonate monolayers

M. Auernhammer, S. J. Schoell, M. Sachsenhauser, K. C. Liao, J. Schwartz, I. D. Sharp, A. Cattani-Scholz

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14 Scopus citations


The synthesis and characterization of self-assembled monolayers prepared from 11-hydroxyundecyphosphonic acid and 9,10-diphenyl-2,6-diphosphonoanthracene on n-type 6H-SiC is described. Structural and chemical properties of these monolayers were investigated through contact angle measurements, atomic force microscopy, x-ray photoelectron spectroscopy, and Fourier transformation infrared spectroscopy, which indicate covalent bonding of the phosphonates to both (0001)- and (000-1)-oriented 6H-SiC crystal faces. Electrical characterization was achieved through contact potential difference and surface photovoltage measurements, which revealed significant changes in the work functions of the substrates by monolayer formation.

Original languageEnglish (US)
Article number101601
JournalApplied Physics Letters
Issue number10
StatePublished - Mar 5 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)


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