Suppression of boron penetration in P-channel MOSFETs using polycrystalline Si1-x-yGexCy gate layers

E. J. Stewart, M. S. Carroll, James C. Sturm

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint

Dive into the research topics of 'Suppression of boron penetration in P-channel MOSFETs using polycrystalline Si1-x-yGexCy gate layers'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds