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Superiority of high power impulse magnetron sputtering in niobium films deposition on copper

  • Weiwei Tan
  • , Bo Li
  • , Xiangyang Lu
  • , Li Xiao
  • , Boting Li
  • , Deyu Yang
  • , Yujia Yang
  • , Chao Ye
  • , Datao Xie

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Material Science