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Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions
David Cohen-Tanugi,
Nan Yao
Princeton Materials Institute
Research output
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Contribution to journal
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Article
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peer-review
63
Scopus citations
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Dive into the research topics of 'Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions'. Together they form a unique fingerprint.
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Physics
Helium Ion
100%
High Resolution
16%
Physics
16%
Signal-to-Noise Ratio
16%
Electron Emission
16%
Monte Carlo Simulation
16%
Stopping Power
16%
Scanning Electron Microscopy
16%
Inelastic Collision
16%
Keyphrases
Nuclear Stopping
20%
Electronic Stopping Power
20%
Gallium Ions
20%