Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions

D. Cohen-Tanugi; N. Yao

doi:10.1017/S1431927609098687

Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions

D. Cohen-Tanugi
, N. Yao

Princeton Materials Institute

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	656-657
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	15
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927609098687
State	Published - Jul 2009

All Science Journal Classification (ASJC) codes

Instrumentation

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title = "Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions",

author = "D. Cohen-Tanugi and N. Yao",

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AU - Yao, N.

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Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions

All Science Journal Classification (ASJC) codes

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