Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions

D. Cohen-Tanugi, N. Yao

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)656-657
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numberSUPPL. 2
DOIs
StatePublished - Jul 2009

All Science Journal Classification (ASJC) codes

  • Instrumentation

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