Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions

D. Cohen-Tanugi; N. Yao

doi:10.1017/S1431927609098687

Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions

D. Cohen-Tanugi, N. Yao

Princeton Materials Institute

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	656-657
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	15
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927609098687
State	Published - Jul 2009

All Science Journal Classification (ASJC) codes

Instrumentation

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@article{b8dd47bb028f4968bf2a3ea1de120b46,

title = "Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions",

author = "D. Cohen-Tanugi and N. Yao",

year = "2009",

month = jul,

doi = "10.1017/S1431927609098687",

language = "English (US)",

volume = "15",

pages = "656--657",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Cambridge University Press",

number = "SUPPL. 2",

}

TY - JOUR

T1 - Superior imaging quality of scanning helium-ion microscopy

T2 - A look at beam-sample interactions

AU - Cohen-Tanugi, D.

AU - Yao, N.

PY - 2009/7

Y1 - 2009/7

UR - http://www.scopus.com/inward/record.url?scp=69949146329&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=69949146329&partnerID=8YFLogxK

U2 - 10.1017/S1431927609098687

DO - 10.1017/S1431927609098687

M3 - Article

AN - SCOPUS:69949146329

SN - 1431-9276

VL - 15

SP - 656

EP - 657

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -

Superior imaging quality of scanning helium-ion microscopy: A look at beam-sample interactions

All Science Journal Classification (ASJC) codes

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