Summary Abstract: Precursor adsorption of oxygen on Si(111) at low temperatures

C. Silvestre, Mansour Shayegan

Research output: Contribution to journalArticle

4 Scopus citations
Original languageEnglish (US)
Pages (from-to)798-800
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume6
Issue number3
DOIs
StatePublished - Jan 1 1988

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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