Subwavelength direct-write nanopatterning using optically trapped microspheres

Engineering & Materials Science

• Microspheres 100%
• Wavelength 65%
• Laser beams 42%
• Lenses 38%
• Feedback control 33%
• Lasers 28%
• Substrates 26%
• Throughput 26%
• Costs 14%

Chemical Compounds

• Microsphere 64%
• Optical Trap 62%
• Wavelength 53%
• Material Processing 50%
• Surface 23%
• Environment 21%

Physics & Astronomy

• near fields 42%
• feedback control 27%
• positioning 24%
• wavelengths 23%
• trapping 19%
• spacing 19%
• costs 18%
• traps 18%
• lenses 18%
• laser beams 18%
• probes 15%
• lasers 10%