Abstract
Summary form only given. Anomalously sharp subthreshold slopes in fully depleted ultrathin SOI MOSFETs are discussed. The effect can be eliminated by control of the lower SOI interface charge condition. The temperature dependence of this effect is also discussed.
Original language | English (US) |
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Pages | 15-16 |
Number of pages | 2 |
State | Published - 1989 |
Event | IEEE SOS/SOI Technology Conference 1989 - Stateline, NV, USA Duration: Oct 3 1989 → Oct 5 1989 |
Other
Other | IEEE SOS/SOI Technology Conference 1989 |
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City | Stateline, NV, USA |
Period | 10/3/89 → 10/5/89 |
All Science Journal Classification (ASJC) codes
- General Engineering