Sub-10 nm self-enclosed self-limited nanofluidic channel arrays

Qiangfei Xia, Keith J. Morton, Robert H. Austin, Stephen Y. Chou

Research output: Contribution to journalArticle

80 Scopus citations

Abstract

We report a new method to fabricate self-enclosed optically transparent nanofluidic channel arrays with sub-10 nm channel width over large areas. Our method involves patterning nanoscale Si trenches using nanoimprint lithography (NIL), sealing the trenches into enclosed channels by ultrafast laser pulse melting and shrinking the channel sizes by self-limiting thermal oxidation. We demonstrate that 100 nm wide Si trenches can be sealed and shrunk to 9 nm wide and that λ-phage DNA molecules can be effectively stretched by the channels.

Original languageEnglish (US)
Pages (from-to)3830-3833
Number of pages4
JournalNano Letters
Volume8
Issue number11
DOIs
StatePublished - Nov 1 2008

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering

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