@inproceedings{5fc81e66a156499d835043357a4f9432,
title = "Study progress of pulse laser annealing for niobium film on copper",
abstract = "The recent studies of laser annealing on niobium films on copper are reported. Annealing is normally used to deal with the surface, reducing defects and even changing the microstructure of the coating film. Short pulse laser can produce a sharp step temperature field on the film thickness scale (µm), which anneals the surface without substrate heated. The laser annealing experiments of niobium thin film sample have been carried out, and according to SEM and FIB results, Nb films melted and recrystallization occurred. Grains growing up can be observed while the power density of laser pulse increased.",
author = "Yang, \{Y. J.\} and Lu, \{X. Y.\} and Xie, \{D. T.\} and Tan, \{W. W.\} and L. Xiao and Yang, \{D. Y.\} and Li, \{B. T.\}",
note = "Publisher Copyright: Content from this work may be used under the terms of the CC BY 3.0 licence ({\textcopyright} 2018); 29th International Linear Accelerator Conference, LINAC 2018 ; Conference date: 16-09-2018 Through 21-09-2018",
year = "2020",
doi = "10.18429/JACoW-LINAC2018-TUPO048",
language = "English (US)",
series = "Proceedings of the 29th Linear Accelerator Conference, LINAC 2018",
publisher = "JACoW Publishing",
pages = "438--441",
booktitle = "Proceedings of the 29th Linear Accelerator Conference, LINAC 2018",
address = "Switzerland",
}