@inproceedings{3a5dfc4f383e4b51b1708b5c7c32ce40,
title = "Stretching DNA in single, extra-long (1.5 cm) nanofluidic channels fabricated using a novel nanoimprint mold",
abstract = "We fabricated the first single centimeter long nanofluidic channel with continuous and uniform channel width (11 nm to 50 nm). The fabrication process uniquely combines the novel method for making imprint molds, nanoimprint lithography, and optional reactive ion etching. The key steps in the novel mold fabrication are anisotropic wet etching of (110)-oriented silicon and conformal edge deposition of mold material, which assure a continuous and uniform channel line. The continuous capillary flow through the entire channel verified the channel continuity over a centimeter-scale distance. We also demonstrated the stretching and transport of DNA strands in a single long nanochannel.",
keywords = "Deoxyribonucleic acid, Nanofabrication, Nanofluidics, Nanoimprint",
author = "Xiaogan Liang and Morton, {Keith J.} and Austin, {Robert H.} and Chou, {Stephen Y.}",
note = "Publisher Copyright: {\textcopyright} 2007 CBMS.; 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 ; Conference date: 07-10-2007 Through 11-10-2007",
year = "2007",
language = "English (US)",
series = "Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007",
publisher = "Chemical and Biological Microsystems Society",
pages = "1622--1624",
editor = "Jean-Louis Viovy and Patrick Tabeling and Stephanie Descroix and Laurent Malaquin",
booktitle = "Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007",
}