Stretching DNA in single, extra-long (1.5 cm) nanofluidic channels fabricated using a novel nanoimprint mold

Xiaogan Liang, Keith J. Morton, Robert H. Austin, Stephen Y. Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We fabricated the first single centimeter long nanofluidic channel with continuous and uniform channel width (11 nm to 50 nm). The fabrication process uniquely combines the novel method for making imprint molds, nanoimprint lithography, and optional reactive ion etching. The key steps in the novel mold fabrication are anisotropic wet etching of (110)-oriented silicon and conformal edge deposition of mold material, which assure a continuous and uniform channel line. The continuous capillary flow through the entire channel verified the channel continuity over a centimeter-scale distance. We also demonstrated the stretching and transport of DNA strands in a single long nanochannel.

Original languageEnglish (US)
Title of host publicationProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
EditorsJean-Louis Viovy, Patrick Tabeling, Stephanie Descroix, Laurent Malaquin
PublisherChemical and Biological Microsystems Society
Pages1622-1624
Number of pages3
ISBN (Electronic)9780979806407
StatePublished - 2007
Event11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 - Paris, France
Duration: Oct 7 2007Oct 11 2007

Publication series

NameProceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Conference

Conference11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007
CountryFrance
CityParis
Period10/7/0710/11/07

All Science Journal Classification (ASJC) codes

  • Chemical Engineering (miscellaneous)
  • Bioengineering

Keywords

  • Deoxyribonucleic acid
  • Nanofabrication
  • Nanofluidics
  • Nanoimprint

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  • Cite this

    Liang, X., Morton, K. J., Austin, R. H., & Chou, S. Y. (2007). Stretching DNA in single, extra-long (1.5 cm) nanofluidic channels fabricated using a novel nanoimprint mold. In J-L. Viovy, P. Tabeling, S. Descroix, & L. Malaquin (Eds.), Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007 (pp. 1622-1624). (Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007). Chemical and Biological Microsystems Society.