Strain relaxation of SiGe islands on compliant oxide

H. Yin, R. Huang, K. D. Hobart, Z. Suo, T. S. Kuan, C. K. Inoki, S. R. Shieh, T. S. Duffy, F. J. Kub, J. C. Sturm

Research output: Contribution to journalArticlepeer-review

79 Scopus citations

Fingerprint

Dive into the research topics of 'Strain relaxation of SiGe islands on compliant oxide'. Together they form a unique fingerprint.

Physics & Astronomy