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Strain relaxation of SiGe islands on compliant oxide
H. Yin, R. Huang, K. D. Hobart, Z. Suo, T. S. Kuan, C. K. Inoki, S. R. Shieh, T. S. Duffy, F. J. Kub, J. C. Sturm
Research output: Contribution to journal › Article › peer-review
79
Scopus
citations