Strain partition of Si/SiGe and SiO2/SiGe on compliant substrates

H. Yin, K. D. Hobart, F. J. Kub, S. R. Shieh, T. S. Duffy, J. C. Sturm

Research output: Contribution to journalArticlepeer-review

28 Scopus citations


Dive into the research topics of 'Strain partition of Si/SiGe and SiO<sub>2</sub>/SiGe on compliant substrates'. Together they form a unique fingerprint.

Physics & Astronomy