Spin-coating of Ge23Sb7S70 chalcogenide glass thin films

Shanshan Song; Nathan Carlie; Laeticia Petit; Kathleen Richardson; Craig B. Arnold

doi:10.1364/cleo.2009.jthe41

Spin-coating of Ge₂₃Sb₇S₇₀ chalcogenide glass thin films

Shanshan Song, Nathan Carlie, Laeticia Petit, Kathleen Richardson, Craig B. Arnold

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate a spin-coating technique for the deposition of Ge₂₃Sb₇S₇₀ chalcogenide glass films. We show that the use of the amine-based solvent allows the deposition of stoichiometric films with low surface roughness and controlled thickness.

Original language	English (US)
Title of host publication	International Quantum Electronics Conference, IQEC 2009
Publisher	Optical Society of America (OSA)
ISBN (Print)	9781557528698
DOIs	https://doi.org/10.1364/cleo.2009.jthe41
State	Published - 2009
Event	International Quantum Electronics Conference, IQEC 2009 - Baltimore, MD, United States Duration: May 31 2009 → Jun 5 2009

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Other

Other	International Quantum Electronics Conference, IQEC 2009
Country/Territory	United States
City	Baltimore, MD
Period	5/31/09 → 6/5/09

All Science Journal Classification (ASJC) codes

Instrumentation
Atomic and Molecular Physics, and Optics

Access to Document

10.1364/cleo.2009.jthe41

Cite this

@inproceedings{57c9991b0d1e4d7fb290e4ad19a16fdd,

title = "Spin-coating of Ge23Sb7S70 chalcogenide glass thin films",

abstract = "We demonstrate a spin-coating technique for the deposition of Ge23Sb7S70 chalcogenide glass films. We show that the use of the amine-based solvent allows the deposition of stoichiometric films with low surface roughness and controlled thickness.",

author = "Shanshan Song and Nathan Carlie and Laeticia Petit and Kathleen Richardson and Arnold, {Craig B.}",

year = "2009",

doi = "10.1364/cleo.2009.jthe41",

language = "English (US)",

isbn = "9781557528698",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of America (OSA)",

booktitle = "International Quantum Electronics Conference, IQEC 2009",

note = "International Quantum Electronics Conference, IQEC 2009 ; Conference date: 31-05-2009 Through 05-06-2009",

}

Song, S, Carlie, N, Petit, L, Richardson, K & Arnold, CB 2009, Spin-coating of Ge₂₃Sb₇S₇₀ chalcogenide glass thin films. in International Quantum Electronics Conference, IQEC 2009. Optics InfoBase Conference Papers, Optical Society of America (OSA), International Quantum Electronics Conference, IQEC 2009, Baltimore, MD, United States, 5/31/09. https://doi.org/10.1364/cleo.2009.jthe41

TY - GEN

T1 - Spin-coating of Ge23Sb7S70 chalcogenide glass thin films

AU - Song, Shanshan

AU - Carlie, Nathan

AU - Petit, Laeticia

AU - Richardson, Kathleen

AU - Arnold, Craig B.

PY - 2009

Y1 - 2009

N2 - We demonstrate a spin-coating technique for the deposition of Ge23Sb7S70 chalcogenide glass films. We show that the use of the amine-based solvent allows the deposition of stoichiometric films with low surface roughness and controlled thickness.

AB - We demonstrate a spin-coating technique for the deposition of Ge23Sb7S70 chalcogenide glass films. We show that the use of the amine-based solvent allows the deposition of stoichiometric films with low surface roughness and controlled thickness.

UR - http://www.scopus.com/inward/record.url?scp=85085777388&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85085777388&partnerID=8YFLogxK

U2 - 10.1364/cleo.2009.jthe41

DO - 10.1364/cleo.2009.jthe41

M3 - Conference contribution

AN - SCOPUS:85085777388

SN - 9781557528698

T3 - Optics InfoBase Conference Papers

BT - International Quantum Electronics Conference, IQEC 2009

PB - Optical Society of America (OSA)

T2 - International Quantum Electronics Conference, IQEC 2009

Y2 - 31 May 2009 through 5 June 2009

ER -