Spin-coating of Ge23Sb7S70 chalcogenide glass thin films

Shanshan Song, Nathan Carlie, Laeticia Petit, Kathleen Richardson, Craig B. Arnold

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a spin-coating technique for the deposition of Ge23Sb7S70 chalcogenide glass films. We show that the use of the amine-based solvent allows the deposition of stoichiometric films with low surface roughness and controlled thickness.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2009
StatePublished - Dec 1 2009
EventConference on Lasers and Electro-Optics, CLEO 2009 - Baltimore, MD, United States
Duration: May 31 2009Jun 5 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherConference on Lasers and Electro-Optics, CLEO 2009
CountryUnited States
CityBaltimore, MD
Period5/31/096/5/09

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Song, S., Carlie, N., Petit, L., Richardson, K., & Arnold, C. B. (2009). Spin-coating of Ge23Sb7S70 chalcogenide glass thin films. In Conference on Lasers and Electro-Optics, CLEO 2009 (Optics InfoBase Conference Papers).