Spin-coating of Ge23Sb7S70 chalcogenide glass thin films

Shanshan Song, Nathan Carlie, Laeticia Petit, Kathleen Richardson, Craig B. Arnold

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a spin-coating technique for the deposition of Ge23Sb7S70 chalcogenide glass films. We show that the use of the amine-based solvent allows the deposition of stoichiometric films with low surface roughness and controlled thickness.

Original languageEnglish (US)
Title of host publicationInternational Quantum Electronics Conference, IQEC 2009
PublisherOptical Society of America
ISBN (Print)9781557528698
StatePublished - Jan 1 2009
EventInternational Quantum Electronics Conference, IQEC 2009 - Baltimore, MD, United States
Duration: May 31 2009Jun 5 2009

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherInternational Quantum Electronics Conference, IQEC 2009
CountryUnited States
CityBaltimore, MD
Period5/31/096/5/09

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Song, S., Carlie, N., Petit, L., Richardson, K., & Arnold, C. B. (2009). Spin-coating of Ge23Sb7S70 chalcogenide glass thin films. In International Quantum Electronics Conference, IQEC 2009 (Optics InfoBase Conference Papers). Optical Society of America.